High-speed wafer deposition equipment HEXAGON
Extremely low Rc system design in the industry and the highest level of inter-wafer reproducibility!
"HEXAGON" is a mass production dedicated wafer-level packaging platform that provides atmospheric degassing, etching, and metal deposition at a very low cost of ownership for applications such as FOWLP. High-speed wafer processing is made possible by wafer transport using a synchronous indexer. With wafer handling, during 24/7 production, the wafer sensing function within the chamber allows for accurate and reproducible positioning, enabling full-face etching and deposition processes. 【Features】 - Processing of wafers passivated with organic films that degas in large quantities - High-performance dual-end effectors achieving short wafer exchange times Atmospheric front-end module using robots - Wafer transport via synchronous indexer enabling high-speed wafer processing - Over 20,000 etching shield kit lifespan due to enhanced uptime and reduced maintenance *For more details, please refer to the related links or feel free to contact us.
- 企業：日本エバテック
- 価格：Other
